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  • Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS [2011]

    Category:
    Artículos
    Authors:
    Lara Lobo Revilla , Beatriz Fernández García , María Rosario Pereiro García , Nerea Bordel García , Evgeny Demenev , Damiano Giubertoni , Massimo Bersani , Philipp Hoenicke , Burkhard Beckhoff , Alfredo Sanz Medel
    Date:
    01 of January of 2011
    It Is a Part of:
    Journal of Analytical Atomic Spectrometry